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MuGFET processing challenges and demonstration of a 45 nm node 6T-SRAM cell

dc.contributor.authorParton, Els
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T03:55:40Z
dc.date.available2021-10-16T03:55:40Z
dc.date.issued2005-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10987
dc.sourceIIOimport
dc.titleMuGFET processing challenges and demonstration of a 45 nm node 6T-SRAM cell
dc.typeJournal article
dc.contributor.imecauthorParton, Els
dc.contributor.imecauthorBiesemans, Serge
dc.source.peerreviewno
dc.source.beginpage24
dc.source.endpage27
dc.source.journalFuture Fab International
dc.source.issue19
imec.availabilityPublished - imec


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