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A new MEMS design for the recovery of natural vibration

dc.contributor.authorParton, Els
dc.contributor.authorSterken, Tom
dc.contributor.authorFiorini, Paolo
dc.date.accessioned2021-10-16T03:57:01Z
dc.date.available2021-10-16T03:57:01Z
dc.date.issued2005-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10992
dc.sourceIIOimport
dc.titleA new MEMS design for the recovery of natural vibration
dc.typeJournal article
dc.contributor.imecauthorParton, Els
dc.contributor.imecauthorSterken, Tom
dc.source.peerreviewno
dc.source.beginpage44
dc.source.endpage47
dc.source.journalElettronica Oggi
dc.source.issue346
imec.availabilityPublished - imec


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