A new MEMS design for the recovery of natural vibration
dc.contributor.author | Parton, Els | |
dc.contributor.author | Sterken, Tom | |
dc.contributor.author | Fiorini, Paolo | |
dc.date.accessioned | 2021-10-16T03:57:01Z | |
dc.date.available | 2021-10-16T03:57:01Z | |
dc.date.issued | 2005-06 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10992 | |
dc.source | IIOimport | |
dc.title | A new MEMS design for the recovery of natural vibration | |
dc.type | Journal article | |
dc.contributor.imecauthor | Parton, Els | |
dc.contributor.imecauthor | Sterken, Tom | |
dc.source.peerreview | no | |
dc.source.beginpage | 44 | |
dc.source.endpage | 47 | |
dc.source.journal | Elettronica Oggi | |
dc.source.issue | 346 | |
imec.availability | Published - imec |
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