Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth
dc.contributor.author | Pawlak, Bartek | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Smith, A.J. | |
dc.contributor.author | Cowern, Nick E.B. | |
dc.contributor.author | Colombeau, B. | |
dc.contributor.author | Pagès, Xavier | |
dc.date.accessioned | 2021-10-16T04:02:11Z | |
dc.date.available | 2021-10-16T04:02:11Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11009 | |
dc.source | IIOimport | |
dc.title | Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pawlak, Bartek | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | no | |
dc.source.beginpage | 101913 | |
dc.source.journal | Applied Physics Letters | |
dc.source.issue | 10 | |
dc.source.volume | 86 | |
imec.availability | Published - imec |
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