Show simple item record

Enhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth

dc.contributor.authorPawlak, Bartek
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSmith, A.J.
dc.contributor.authorCowern, Nick E.B.
dc.contributor.authorColombeau, B.
dc.contributor.authorPagès, Xavier
dc.date.accessioned2021-10-16T04:02:11Z
dc.date.available2021-10-16T04:02:11Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11009
dc.sourceIIOimport
dc.titleEnhanced boron activation in silicon by high ramp-up rate solid phase epitaxial regrowth
dc.typeJournal article
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage101913
dc.source.journalApplied Physics Letters
dc.source.issue10
dc.source.volume86
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record