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Microstructural and electrical characterization of thin dielectrica with high k values

dc.contributor.authorPetry, Jasmine
dc.date.accessioned2021-10-16T04:03:39Z
dc.date.available2021-10-16T04:03:39Z
dc.date.issued2005-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11014
dc.sourceIIOimport
dc.titleMicrostructural and electrical characterization of thin dielectrica with high k values
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVandervorst, Wilfried
imec.availabilityPublished - open access


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