Formation of metal oxide particles in atomic layer deposition during the chemisorption of metal chlorides: a review

dc.contributor.author	Puurunen, Riikka
dc.date.accessioned	2021-10-16T04:18:36Z
dc.date.available	2021-10-16T04:18:36Z
dc.date.issued	2005-02
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/11064
dc.source	IIOimport
dc.title	Formation of metal oxide particles in atomic layer deposition during the chemisorption of metal chlorides: a review
dc.type	Journal article
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	79
dc.source.endpage	90
dc.source.journal	Chemical Vapor Deposition
dc.source.issue	2
dc.source.volume	11
imec.availability	Published - open access