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Pushing today's technology to its limits with LMS OPTIMUS

dc.contributor.authorCartuyvels, Rudi
dc.contributor.authorDupas, Luc
dc.contributor.authorTzannetakis, N.
dc.date.accessioned2021-09-29T14:18:23Z
dc.date.available2021-09-29T14:18:23Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1110
dc.sourceIIOimport
dc.titlePushing today's technology to its limits with LMS OPTIMUS
dc.typeJournal article
dc.contributor.imecauthorCartuyvels, Rudi
dc.contributor.imecauthorDupas, Luc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage255
dc.source.endpage259
dc.source.journalSemiconductor Fabtech
dc.source.volume6
imec.availabilityPublished - open access


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