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Filter-through device: a distributed RF-MEMS capacitive series switch

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorMertens, Robert
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T04:40:28Z
dc.date.available2021-10-16T04:40:28Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11134
dc.sourceIIOimport
dc.titleFilter-through device: a distributed RF-MEMS capacitive series switch
dc.typeJournal article
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpageS97
dc.source.endpageS102
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue7
dc.source.volume15
imec.availabilityPublished - imec
imec.internalnotesPaper from the 15th Eur. Worksh. on Micromechanics, Leuven, 2ept. 2004


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