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Revealing the porous structure of low-k materials through solvent diffusion

dc.contributor.authorShamiryan, Denis
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T04:59:18Z
dc.date.available2021-10-16T04:59:18Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11191
dc.sourceIIOimport
dc.titleRevealing the porous structure of low-k materials through solvent diffusion
dc.typeBook chapter
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage305
dc.source.bookMaterials for Information Technology. Devices, Interconnects and Packaging
dc.source.endpage314
imec.availabilityPublished - imec
imec.internalnotesEngineering Materials and Processes


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