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Recent advances in system integration and MEMS packaging

dc.contributor.authorSnoeckx, Koen
dc.contributor.authorBaert, Kris
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-16T05:11:57Z
dc.date.available2021-10-16T05:11:57Z
dc.date.issued2005-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11229
dc.sourceIIOimport
dc.titleRecent advances in system integration and MEMS packaging
dc.typeJournal article
dc.contributor.imecauthorSnoeckx, Koen
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewno
dc.source.beginpage10
dc.source.endpage12
dc.source.journalMST News
dc.source.issue1
imec.availabilityPublished - imec


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