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Pushing PVD to the limits - recent advances

dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-16T05:44:12Z
dc.date.available2021-10-16T05:44:12Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11323
dc.sourceIIOimport
dc.titlePushing PVD to the limits - recent advances
dc.typeBook chapter
dc.contributor.imecauthorTokei, Zsolt
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage61
dc.source.bookMaterials for Information Technology. Devices, Interconnects and Packaging
dc.source.endpage68
imec.availabilityPublished - open access
imec.internalnotesEngineering Materials and Processes


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