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Interface characterization of nanoscale laminate structures on dense dielectric substrates by X-ray reflectivity

dc.contributor.authorTravaly, Youssef
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorMartin Hoyas, Ana
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.contributor.authorAbell, Thomas
dc.contributor.authorSutcliffe, Victor
dc.contributor.authorJonas, Alain M.
dc.date.accessioned2021-10-16T05:47:59Z
dc.date.available2021-10-16T05:47:59Z
dc.date.issued2005-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11333
dc.sourceIIOimport
dc.titleInterface characterization of nanoscale laminate structures on dense dielectric substrates by X-ray reflectivity
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage84316
dc.source.journalJournal of Applied Physics
dc.source.issue8
dc.source.volume97
imec.availabilityPublished - imec


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