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Litho enhancements for 45nm-node MuGFETs

dc.contributor.authorVerhaegen, Staf
dc.contributor.authorErcken, Monique
dc.contributor.authorNackaerts, Axel
dc.contributor.authorVandenberghe, Geert
dc.date.accessioned2021-10-16T06:49:06Z
dc.date.available2021-10-16T06:49:06Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11506
dc.sourceIIOimport
dc.titleLitho enhancements for 45nm-node MuGFETs
dc.typeJournal article
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorVandenberghe, Geert
dc.source.peerreviewno
dc.source.beginpage14
dc.source.endpage17
dc.source.journalMicrolithography World
dc.source.issue3
dc.source.volume14
imec.availabilityPublished - imec


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