Litho enhancements for 45nm-node MuGFETs
dc.contributor.author | Verhaegen, Staf | |
dc.contributor.author | Ercken, Monique | |
dc.contributor.author | Nackaerts, Axel | |
dc.contributor.author | Vandenberghe, Geert | |
dc.date.accessioned | 2021-10-16T06:49:06Z | |
dc.date.available | 2021-10-16T06:49:06Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11506 | |
dc.source | IIOimport | |
dc.title | Litho enhancements for 45nm-node MuGFETs | |
dc.type | Journal article | |
dc.contributor.imecauthor | Ercken, Monique | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.source.peerreview | no | |
dc.source.beginpage | 14 | |
dc.source.endpage | 17 | |
dc.source.journal | Microlithography World | |
dc.source.issue | 3 | |
dc.source.volume | 14 | |
imec.availability | Published - imec |
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