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Dependency of the properties of SrxBiyTa2O9 thin films on the Sr and Bi stoichiometry

dc.contributor.authorViapiana, Matteo
dc.contributor.authorSchwitters, Michael
dc.contributor.authorWouters, Dirk
dc.contributor.authorMaes, Herman
dc.contributor.authorVan der Biest, Omer
dc.date.accessioned2021-10-16T06:54:24Z
dc.date.available2021-10-16T06:54:24Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11520
dc.sourceIIOimport
dc.titleDependency of the properties of SrxBiyTa2O9 thin films on the Sr and Bi stoichiometry
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage34
dc.source.endpage38
dc.source.journalMaterials Science and Engineering B
dc.source.issue1_3
dc.source.volume118
imec.availabilityPublished - open access
imec.internalnotesEMRS 2004 Symposium D: Functional Oxides for Advanced Semiconductor Technologies


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