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Surface engineering using self-assembled monolayers: model substrates for atomic-layer deposition

dc.contributor.authorWhelan, Caroline
dc.contributor.authorDemas, Anne-Cécile
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorFernandez Landaluce, Tatiana
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorCarbonell, Laure
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T07:07:53Z
dc.date.available2021-10-16T07:07:53Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11555
dc.sourceIIOimport
dc.titleSurface engineering using self-assembled monolayers: model substrates for atomic-layer deposition
dc.typeBook chapter
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage69
dc.source.bookMaterials for Information Technology. Devices, Interconnects and Packaging
dc.source.endpage76
imec.availabilityPublished - open access
imec.internalnotesPaper from EUROMAT 2003


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