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Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning

dc.contributor.authorXu, Kaidong
dc.contributor.authorVos, Rita
dc.contributor.authorVereecke, Guy
dc.contributor.authorDoumen, Geert
dc.contributor.authorFyen, Wim
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.authorVinckier, Chris
dc.contributor.authorFransaer, J.
dc.contributor.authorKovacs, F.
dc.date.accessioned2021-10-16T07:16:15Z
dc.date.available2021-10-16T07:16:15Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11576
dc.sourceIIOimport
dc.titleFundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning
dc.typeJournal article
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.beginpage2160
dc.source.endpage2175
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue5
dc.source.volume23
imec.availabilityPublished - imec


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