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Dielectric properties of dysprosium- and scandium-doped hafnium dioxide thin films

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVenugopalan, Sriram
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorLehnen, Peer
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-16T15:00:08Z
dc.date.available2021-10-16T15:00:08Z
dc.date.issued2007-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11623
dc.sourceIIOimport
dc.titleDielectric properties of dysprosium- and scandium-doped hafnium dioxide thin films
dc.typeJournal article
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage162902
dc.source.journalApplied Physics Letters
dc.source.issue16
dc.source.volume91
dc.identifier.urlhttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=APPLAB000091000016162902000001&idtype=cvips&gifs=yes
imec.availabilityPublished - imec


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