Dielectric properties of dysprosium- and scandium-doped hafnium dioxide thin films

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Authors

Adelmann, Christoph; Venugopalan, Sriram; Van Elshocht, Sven; Lehnen, Peer; Conard, Thierry; De Gendt, Stefan

Issue

16

Journal

Applied Physics Letters

Volume

91

Title

Dielectric properties of dysprosium- and scandium-doped hafnium dioxide thin films

Publication type

Journal article

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