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Composite particles for chemical-mechancial planarization applications

dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-16T15:00:43Z
dc.date.available2021-10-16T15:00:43Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11651
dc.sourceIIOimport
dc.titleComposite particles for chemical-mechancial planarization applications
dc.typePHD thesis
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorMaex, Karen
imec.availabilityPublished - open access


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