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Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM

dc.contributor.authorArmini, Silvia
dc.contributor.authorBurtovyy, Ruslan
dc.contributor.authorLuzinov, Igor
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMaex, Karen
dc.contributor.authorMoinpour, Mansour
dc.date.accessioned2021-10-16T15:00:45Z
dc.date.available2021-10-16T15:00:45Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11652
dc.sourceIIOimport
dc.titleInteraction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.beginpageH74
dc.source.endpageH78
dc.source.journalElectrochemical and Solid-State Letters
dc.source.issue2
dc.source.volume10
imec.availabilityPublished - imec


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