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Composite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity study

dc.contributor.authorArmini, Silvia
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMaex, Karen
dc.contributor.authorHernandez, Jose Luis
dc.contributor.authorMoinpour, Mansour
dc.date.accessioned2021-10-16T15:00:54Z
dc.date.available2021-10-16T15:00:54Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11657
dc.sourceIIOimport
dc.titleComposite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity study
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorHernandez, Jose Luis
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.beginpageH667
dc.source.endpageH371
dc.source.journalJournal of The Electrochemical Society
dc.source.issue8
dc.source.volume154
imec.availabilityPublished - imec


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