Show simple item record

High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography

dc.contributor.authorAssouar, M.B.
dc.contributor.authorElmazria, O.
dc.contributor.authorKirsch, P.
dc.contributor.authorAlnot, P.
dc.contributor.authorMortet, V.
dc.contributor.authorTiusan, C.
dc.date.accessioned2021-10-16T15:00:59Z
dc.date.available2021-10-16T15:00:59Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11660
dc.sourceIIOimport
dc.titleHigh-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage114507
dc.source.journalJournal of Applied Physics
dc.source.issue11
dc.source.volume101
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
15943.pdf
Size:
434.6Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record