Dielectric films for advanced microelectronics
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Green, Martin | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-16T15:01:57Z | |
dc.date.available | 2021-10-16T15:01:57Z | |
dc.date.issued | 2007 | |
dc.identifier.isbn | 978-0-470-013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11683 | |
dc.source | IIOimport | |
dc.title | Dielectric films for advanced microelectronics | |
dc.type | Book | |
dc.contributor.imecauthor | Maex, Karen | |
dc.source.numberofpages | 486 | |
dc.source.peerreview | no | |
imec.availability | Published - imec |
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