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Challenges of plasma damage of low-k materials

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorVanhaelemeersch, Serge
dc.date.accessioned2021-10-16T15:02:00Z
dc.date.available2021-10-16T15:02:00Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11684
dc.sourceIIOimport
dc.titleChallenges of plasma damage of low-k materials
dc.typeProceedings paper
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.beginpage100
dc.source.endpage103
dc.source.conference234th ACS Meeting
dc.source.conferencedate19/08/2007
dc.source.conferencelocationBoston USA
imec.availabilityPublished - imec


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