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Impact of line-edge roughness on FinFET matching performance

dc.contributor.authorBaravelli, Emanuele
dc.contributor.authorDixit, Abhisek
dc.contributor.authorRooyackers, Rita
dc.contributor.authorJurczak, Gosia
dc.contributor.authorSpeciale, Nicolo
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-16T15:02:23Z
dc.date.available2021-10-16T15:02:23Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11692
dc.sourceIIOimport
dc.titleImpact of line-edge roughness on FinFET matching performance
dc.typeJournal article
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDe Meyer, Kristin
dc.source.peerreviewno
dc.source.beginpage2466
dc.source.endpage2474
dc.source.journalIEEE Trans. Electron Devices
dc.source.issue9
dc.source.volume54
imec.availabilityPublished - imec


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