Show simple item record

Combined illumination sources for hyper-NA contact hole printing

dc.contributor.authorBekaert, Joost
dc.contributor.authorTruffert, Vincent
dc.contributor.authorWillems, Patrick
dc.contributor.authorVan Look, Lieve
dc.contributor.authorOp de Beeck, Maaike
dc.contributor.authorHendrickx, Eric
dc.contributor.authorVandenberghe, Geert
dc.date.accessioned2021-10-16T15:03:23Z
dc.date.available2021-10-16T15:03:23Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11709
dc.sourceIIOimport
dc.titleCombined illumination sources for hyper-NA contact hole printing
dc.typeJournal article
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorTruffert, Vincent
dc.contributor.imecauthorWillems, Patrick
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecTruffert, Vincent::0000-0001-7851-830X
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.source.peerreviewno
dc.source.beginpage48
dc.source.endpage50
dc.source.journalSolid State Technology
dc.source.issue11
dc.source.volume50
dc.identifier.urlhttp://sst.pennnet.com/display_article/308911/5/ARTCL/none/none/IMEC-achiev
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record