dc.contributor.author | Bekaert, Joost | |
dc.contributor.author | Truffert, Vincent | |
dc.contributor.author | Willems, Patrick | |
dc.contributor.author | Van Look, Lieve | |
dc.contributor.author | Op de Beeck, Maaike | |
dc.contributor.author | Hendrickx, Eric | |
dc.contributor.author | Vandenberghe, Geert | |
dc.date.accessioned | 2021-10-16T15:03:23Z | |
dc.date.available | 2021-10-16T15:03:23Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11709 | |
dc.source | IIOimport | |
dc.title | Combined illumination sources for hyper-NA contact hole printing | |
dc.type | Journal article | |
dc.contributor.imecauthor | Bekaert, Joost | |
dc.contributor.imecauthor | Truffert, Vincent | |
dc.contributor.imecauthor | Willems, Patrick | |
dc.contributor.imecauthor | Van Look, Lieve | |
dc.contributor.imecauthor | Op de Beeck, Maaike | |
dc.contributor.imecauthor | Hendrickx, Eric | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
dc.contributor.orcidimec | Truffert, Vincent::0000-0001-7851-830X | |
dc.contributor.orcidimec | Op de Beeck, Maaike::0000-0002-2700-6432 | |
dc.source.peerreview | no | |
dc.source.beginpage | 48 | |
dc.source.endpage | 50 | |
dc.source.journal | Solid State Technology | |
dc.source.issue | 11 | |
dc.source.volume | 50 | |
dc.identifier.url | http://sst.pennnet.com/display_article/308911/5/ARTCL/none/none/IMEC-achiev | |
imec.availability | Published - imec | |