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3D-analysis of semiconductor structures by electron tomography

dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorKalio, Andre
dc.contributor.authorSourty, Erwan
dc.date.accessioned2021-10-16T15:03:46Z
dc.date.available2021-10-16T15:03:46Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11715
dc.sourceIIOimport
dc.title3D-analysis of semiconductor structures by electron tomography
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.beginpage2707
dc.source.endpage2713
dc.source.journalMicroelectronic Engineering
dc.source.issue11
dc.source.volume84
imec.availabilityPublished - imec
imec.internalnotesPaper from Materials for Advanced Metallization - MAM


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