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On the splitting of high order Laue zone lines in CBED analysis of stress in silicon

dc.contributor.authorBenedetti, Alessandro
dc.contributor.authorBender, Hugo
dc.contributor.authorTorregiani, Cristina
dc.date.accessioned2021-10-16T15:03:49Z
dc.date.available2021-10-16T15:03:49Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11716
dc.sourceIIOimport
dc.titleOn the splitting of high order Laue zone lines in CBED analysis of stress in silicon
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpageH217
dc.source.endpageH224
dc.source.journalJournal of the Electrochemical Society
dc.source.issue3
dc.source.volume154
imec.availabilityPublished - imec


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