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Nanoscale imaging and x-ray spectroscopy of electrically active defects in ultra thin dielectrics on silicon

dc.contributor.authorBernardini, S.
dc.contributor.authorIshii, M.
dc.contributor.authorWhittaker, E.
dc.contributor.authorHamilton, B.
dc.contributor.authorFreeland, C.
dc.contributor.authorPoolton, N.R.J.
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-16T15:04:05Z
dc.date.available2021-10-16T15:04:05Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11720
dc.sourceIIOimport
dc.titleNanoscale imaging and x-ray spectroscopy of electrically active defects in ultra thin dielectrics on silicon
dc.typeJournal article
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage2286
dc.source.endpage2289
dc.source.journalMicroelectronic Engineering
dc.source.issue9_10
dc.source.volume84
imec.availabilityPublished - imec


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