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Experimental validation of mechanical stress models by micro-Raman spectroscopy

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorPozzat, G.
dc.contributor.authorPinardi, Kuntjoro
dc.contributor.authorHoward, Dave
dc.contributor.authorIgnat, M.
dc.contributor.authorJain, Suresh
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-29T14:24:02Z
dc.date.available2021-09-29T14:24:02Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1176
dc.sourceIIOimport
dc.titleExperimental validation of mechanical stress models by micro-Raman spectroscopy
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1751
dc.source.endpage1754
dc.source.journalMicroelectronics and Reliability
dc.source.volume36
imec.availabilityPublished - open access
imec.internalnotesPaper from ESREF '96 - 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis. October 8-11, 1996. Enschede, The Netherlands.


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