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Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorClarysse, Trudo
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSnauwaert, J.J.
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-09-29T14:24:29Z
dc.date.available2021-09-29T14:24:29Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1180
dc.sourceIIOimport
dc.titleElectrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
dc.typeJournal article
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage937
dc.source.endpage945
dc.source.journalScanning Microscopy
dc.source.issue4
dc.source.volume10
imec.availabilityPublished - open access


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