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Leakage current control in recessed SiGe source/drain junctions

dc.contributor.authorClaeys, Cor
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorEneman, Geert
dc.contributor.authorVerheyen, Peter
dc.contributor.authorBender, Hugo
dc.contributor.authorSchreutelkamp, Rob
dc.contributor.authorWashington, L.
dc.contributor.authorNouri, F.
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-16T15:19:25Z
dc.date.available2021-10-16T15:19:25Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11874
dc.sourceIIOimport
dc.titleLeakage current control in recessed SiGe source/drain junctions
dc.typeJournal article
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpageH814
dc.source.endpageH821
dc.source.journalJournal of the Electrochemical Society
dc.source.issue9
dc.source.volume154
imec.availabilityPublished - imec


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