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Stress hybridization for multigate devices fabricated on supercritical strained-SOI (SC-SSOI)

dc.contributor.authorCollaert, Nadine
dc.contributor.authorRooyackers, Rita
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorLeys, Frederik
dc.contributor.authorCayrefourcq, I.
dc.contributor.authorGhyselen, Bruno
dc.contributor.authorLoo, Roger
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T15:22:13Z
dc.date.available2021-10-16T15:22:13Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11895
dc.sourceIIOimport
dc.titleStress hybridization for multigate devices fabricated on supercritical strained-SOI (SC-SSOI)
dc.typeJournal article
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.beginpage646
dc.source.endpage648
dc.source.journalIEEE Electron Device Letters
dc.source.issue7
dc.source.volume28
imec.availabilityPublished - imec


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