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Physical characterization of ultra-thin high k dielectrics

dc.contributor.authorConard, Thierry
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T15:22:39Z
dc.date.available2021-10-16T15:22:39Z
dc.date.issued2007-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11898
dc.sourceIIOimport
dc.titlePhysical characterization of ultra-thin high k dielectrics
dc.typeBook chapter
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpage337
dc.source.bookDielectric Films for Advanced Microelectronics
dc.source.endpage366
imec.availabilityPublished - imec
imec.internalnotesWiley Series in Materials for Electronic and Optoelectronic Applications


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