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The behaviour of Si and CoSi2 during low energy nitrogen bombardment, with and without O-2 flooding

dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBrijs, Bert
dc.contributor.authorStorm, Wolfgang
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Coster, Walter
dc.date.accessioned2021-09-29T14:25:48Z
dc.date.available2021-09-29T14:25:48Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1192
dc.sourceIIOimport
dc.titleThe behaviour of Si and CoSi2 during low energy nitrogen bombardment, with and without O-2 flooding
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage534
dc.source.endpage538
dc.source.journalNuclear Instruments and Methods in Physics Research B
dc.source.volume113
imec.availabilityPublished - imec
imec.internalnotes4th European Conf. on Accelerators in Applied Research and Technology; 1995; Switzerland


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