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Plasma parameters obtained with planar probe and optical emission spectroscopy

dc.contributor.authorDaltrini, Andre
dc.contributor.authorMoshkalev, Stanislas
dc.contributor.authorSwart, Laura
dc.contributor.authorVerdonck, Patrick
dc.date.accessioned2021-10-16T15:27:58Z
dc.date.available2021-10-16T15:27:58Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11935
dc.sourceIIOimport
dc.titlePlasma parameters obtained with planar probe and optical emission spectroscopy
dc.typeJournal article
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage67
dc.source.endpage73
dc.source.journalJournal of Integrated Circuits and Systems
dc.source.issue2
dc.source.volume2
imec.availabilityPublished - open access


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