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Formation of dense self-assembled monolayers of (n-decyl)trichlorosilanes on Ta/Ta2O5

dc.contributor.authorDe Palma, Randy
dc.contributor.authorLaureyn, Wim
dc.contributor.authorFrederix, Filip
dc.contributor.authorBonroy, Kristien
dc.contributor.authorPireaux, J.-J.
dc.contributor.authorBorghs, Gustaaf
dc.contributor.authorMaes, Guido
dc.date.accessioned2021-10-16T15:34:20Z
dc.date.available2021-10-16T15:34:20Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11976
dc.sourceIIOimport
dc.titleFormation of dense self-assembled monolayers of (n-decyl)trichlorosilanes on Ta/Ta2O5
dc.typeJournal article
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewyes
dc.source.beginpage443
dc.source.endpage451
dc.source.journalLangmuir
dc.source.issue2
dc.source.volume23
imec.availabilityPublished - imec


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