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Detection of nanomechanical motion by evanescent light wave coupling

dc.contributor.authorDe Vlaminck, Iwijn
dc.contributor.authorRoels, Joris
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.contributor.authorLagae, Liesbet
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-16T15:36:22Z
dc.date.available2021-10-16T15:36:22Z
dc.date.issued2007-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11988
dc.sourceIIOimport
dc.titleDetection of nanomechanical motion by evanescent light wave coupling
dc.typeJournal article
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage233116
dc.source.journalApplied Physics Letters
dc.source.issue23
dc.source.volume90
imec.availabilityPublished - imec


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