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Model for the emission of Si+ ions during oxygen bombardment of Si(100) surfaces

dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:39:40Z
dc.date.available2021-09-29T12:39:40Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11
dc.sourceIIOimport
dc.titleModel for the emission of Si+ ions during oxygen bombardment of Si(100) surfaces
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage15015
dc.source.endpage15025
dc.source.journalPhysical Review B
dc.source.volume50
imec.availabilityPublished - open access


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