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Spectroscopic techniques for MEMS inspection

dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-16T15:38:52Z
dc.date.available2021-10-16T15:38:52Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12004
dc.sourceIIOimport
dc.titleSpectroscopic techniques for MEMS inspection
dc.typeBook chapter
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage459
dc.source.bookOptical Inspection of Microsystems
dc.source.endpage481
imec.availabilityPublished - open access
imec.internalnotesChapter 14


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