| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Schmitz, Jurrian | |
| dc.contributor.author | Pantisano, Luigi | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Houssa, Michel | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.date.accessioned | 2021-10-16T15:42:01Z | |
| dc.date.available | 2021-10-16T15:42:01Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12023 | |
| dc.source | IIOimport | |
| dc.title | Electrical characterization of advanced gate dielectrics | |
| dc.type | Book chapter | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Houssa, Michel | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 371 | |
| dc.source.book | Dielectric Films for Advanced Microelectronics | |
| dc.source.endpage | 435 | |
| imec.availability | Published - imec | |
| imec.internalnotes | Wiley Series in Materials for Electronic and Optoelectronic Applications | |
