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Thermal stability of NiPt- and Pt-silicide contacts on SiGe source/drain

dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorVerheyen, Peter
dc.contributor.authorOpsomer, Karl
dc.contributor.authorVrancken, Christa
dc.contributor.authorAbsil, Philippe
dc.contributor.authorLauwers, Anne
dc.date.accessioned2021-10-16T15:46:34Z
dc.date.available2021-10-16T15:46:34Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12048
dc.sourceIIOimport
dc.titleThermal stability of NiPt- and Pt-silicide contacts on SiGe source/drain
dc.typeJournal article
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorLauwers, Anne
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2547
dc.source.endpage2551
dc.source.journalMicroelectronic Engineering
dc.source.issue11
dc.source.volume84
imec.availabilityPublished - open access
imec.internalnotesPaper from MAM 2007


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