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Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction

dc.contributor.authorDortu, Fabian
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T15:55:08Z
dc.date.available2021-10-16T15:55:08Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12095
dc.sourceIIOimport
dc.titleNonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction
dc.typeJournal article
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewno
dc.source.beginpage53107
dc.source.journalJournal of Applied Physics
dc.source.issue5
dc.source.volume101
imec.availabilityPublished - imec
imec.internalnotesPresented at EMRS 2006


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