dc.contributor.author | Duffy, Ray | |
dc.contributor.author | Van Dal, Mark | |
dc.contributor.author | Pawlak, Bartek | |
dc.contributor.author | Kaiser, M. | |
dc.contributor.author | Weemaes, R.G.R. | |
dc.contributor.author | Degroote, Bart | |
dc.contributor.author | Kunnen, Eddy | |
dc.contributor.author | Altamirano Sanchez, Efrain | |
dc.date.accessioned | 2021-10-16T15:57:36Z | |
dc.date.available | 2021-10-16T15:57:36Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12107 | |
dc.source | IIOimport | |
dc.title | Solid phase epitaxy versus random nucleation and growth in sub-20 nm wide fin field-effect transistors | |
dc.type | Journal article | |
dc.contributor.imecauthor | Van Dal, Mark | |
dc.contributor.imecauthor | Pawlak, Bartek | |
dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 241912 | |
dc.source.journal | Applied Physics Letters | |
dc.source.issue | 24 | |
dc.source.volume | 90 | |
imec.availability | Published - open access | |