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Influence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions

dc.contributor.authorFaifer, V.N.
dc.contributor.authorSchroder, D.K.
dc.contributor.authorCurrent, M.I.
dc.contributor.authorClarysse, Trudo
dc.contributor.authorTimans, P.J.
dc.contributor.authorZangerle, T.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorWong, T.M.H.
dc.contributor.authorMoussa, Alain
dc.contributor.authorMcCoy, S.
dc.contributor.authorGelpey, S.
dc.contributor.authorLerch, W.
dc.date.accessioned2021-10-16T16:06:02Z
dc.date.available2021-10-16T16:06:02Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12148
dc.sourceIIOimport
dc.titleInfluence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMoussa, Alain
dc.source.peerreviewno
dc.source.beginpage1588
dc.source.endpage1592
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue5
dc.source.volume25
imec.availabilityPublished - imec


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