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Depth resolution optimization for low-energy ERDA

dc.contributor.authorGiangrandi, Simone
dc.contributor.authorArstila, Kai
dc.contributor.authorBrijs, Bert
dc.contributor.authorSajavaara, T.
dc.contributor.authorVantomme, Andre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T16:15:49Z
dc.date.available2021-10-16T16:15:49Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12193
dc.sourceIIOimport
dc.titleDepth resolution optimization for low-energy ERDA
dc.typeJournal article
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage512
dc.source.endpage515
dc.source.journalNuclear Instruments and Methods in Physics Research B
dc.source.issue1_2
dc.source.volume261
imec.availabilityPublished - open access
imec.internalnotesCAARI 2006 paper


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