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Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks

dc.contributor.authorGreen, M.L.
dc.contributor.authorChang, Shou-Zen
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorSchram, Tom
dc.contributor.authorHattrick-Simpers, J.
dc.date.accessioned2021-10-16T16:23:34Z
dc.date.available2021-10-16T16:23:34Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12227
dc.sourceIIOimport
dc.titleApplication of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks
dc.typeJournal article
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorSchram, Tom
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage2209
dc.source.endpage2212
dc.source.journalMicroelectronic Engineering
dc.source.issue9_10
dc.source.volume84
imec.availabilityPublished - imec
imec.internalnotesINFOS 2007


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