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Microcrystalline silicon germanium for MEMS applications

dc.contributor.authorGromova, Maria
dc.date.accessioned2021-10-16T16:24:00Z
dc.date.available2021-10-16T16:24:00Z
dc.date.issued2007-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12229
dc.sourceIIOimport
dc.titleMicrocrystalline silicon germanium for MEMS applications
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorMertens, Robert
dc.contributor.thesisadvisorVan Hoof, Chris
imec.availabilityPublished - open access


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