Origin of visible luminescence in hydrogenated amorphous silicon nitride
dc.contributor.author | Hao, H. L. | |
dc.contributor.author | Wu, L. K. | |
dc.contributor.author | Shen, W. Z. | |
dc.contributor.author | Dekkers, Harold | |
dc.date.accessioned | 2021-10-16T16:27:49Z | |
dc.date.available | 2021-10-16T16:27:49Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12245 | |
dc.source | IIOimport | |
dc.title | Origin of visible luminescence in hydrogenated amorphous silicon nitride | |
dc.type | Journal article | |
dc.contributor.imecauthor | Dekkers, Harold | |
dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
dc.source.peerreview | no | |
dc.source.beginpage | 201922 | |
dc.source.journal | Applied Physics Letters | |
dc.source.issue | 20 | |
dc.source.volume | 91 | |
imec.availability | Published - imec |
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