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Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films

dc.contributor.authorHardy, An
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDouheret, Olivier
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorWitters, Thomas
dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorHeyns, Marc
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorMullens, J.
dc.date.accessioned2021-10-16T16:29:20Z
dc.date.available2021-10-16T16:29:20Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12251
dc.sourceIIOimport
dc.titleAqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films
dc.typeJournal article
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage3484
dc.source.endpage3493
dc.source.journalJournal of Materials Research
dc.source.issue12
dc.source.volume22
imec.availabilityPublished - open access


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