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Laser ablation as enabling technology for the structuring of optical multilayer structures

dc.contributor.authorHendrickx, Nina
dc.contributor.authorVan Steenberge, Geert
dc.contributor.authorGeerinck, Peter
dc.contributor.authorVan Daele, Peter
dc.date.accessioned2021-10-16T16:35:20Z
dc.date.available2021-10-16T16:35:20Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12275
dc.sourceIIOimport
dc.titleLaser ablation as enabling technology for the structuring of optical multilayer structures
dc.typeJournal article
dc.contributor.imecauthorVan Steenberge, Geert
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.orcidimecVan Steenberge, Geert::0000-0001-8574-1235
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage118
dc.source.endpage121
dc.source.journalJournal of Physics: Conference Series
dc.source.volume59
imec.availabilityPublished - open access


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